Accurate Modelling of Average Phosphorus Diffusivities in Germanium after Long Thermal Anneals

@article{Carroll2006AccurateMO,
  title={Accurate Modelling of Average Phosphorus Diffusivities in Germanium after Long Thermal Anneals},
  author={M. S. Carroll and R. Koudelka},
  journal={2006 International SiGe Technology and Device Meeting},
  year={2006},
  pages={1-2}
}
In summary, phosphorus diffusivities in germanium were measured after long anneals at temperatures between 600degC and 800degC. The diffusivities are extrinsic (i.e., D ~ (n/ni)2) but are slower than recently reported extrinsic diffusivities and a slightly larger activation energy is also measured in this work than the previous work. Using a diffusion model that includes a segregation term between the cap oxide and the germanium combined with a peak solid solubility of 3times1019 cm-3 good fits… CONTINUE READING