Accurate Automatic Defect Detection Method Using Quadtree Decomposition on SEM Images

@article{Lee2014AccurateAD,
  title={Accurate Automatic Defect Detection Method Using Quadtree Decomposition on SEM Images},
  author={Youngjoo Lee and Jeongjin Lee},
  journal={IEEE Transactions on Semiconductor Manufacturing},
  year={2014},
  volume={27},
  pages={223-231}
}
In this paper, we propose an accurate automatic defect detection method using the quadtree decomposition on scanning electron microscope (SEM) images. The proposed method consists of five steps including alignment between the inspection and reference images, edge relaxation, defect candidate detection, multichannel integration, and defect scoring. Since the periodicity of semiconductor SEM images is usually high, alignment can be failed due to a lot of local minima. To resolve this problem, we… CONTINUE READING

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