Acceleration insensitive hemispherical shell resonators using pop-up rings

Abstract

This work introduces DICE (Deep Isotropic Chemical Etching) process for fabrication of highly symmetric 3D Hemispherical Shell Resonators (HSR) based on HNA etching of <111> silicon using a pop-up ring mask. The proposed method is used to fabricate 650 nm thick SiO2 hemispherical shell with a diameter of 180 μm, demonstrating a 3D symmetry of 99%. The… (More)

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