Absolute capacitive grating displacement measuring system with both high-precision and long-range

@inproceedings{Zhang2019AbsoluteCG,
  title={Absolute capacitive grating displacement measuring system with both high-precision and long-range},
  author={Dongdong Zhang and Shuji Zhao and Quanshui Zheng and Li Lin},
  year={2019}
}
Abstract In this paper, we propose an absolute capacitive grating displacement measuring system with both high-precision and long-range. This system includes a MOVER and a STATOR. A thin layer of dielectric film is respectively grown on concact surfaces of the MOVER and the STATOR. The MOVER moves along the length direction of the system relative to the STATOR in a contact mode to minimize the measurement error caused by gap change. The system is able to generate eight signals at any… CONTINUE READING

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