ALUMINUM NITRIDE PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANSDUCER ARRAYS

@inproceedings{Shelton2012ALUMINUMNP,
  title={ALUMINUM NITRIDE PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANSDUCER ARRAYS},
  author={S. Shelton and A. Guedes and R. Przybyla and R. Krigel and B. Boser and D. Horsley},
  year={2012}
}
Air-coupled piezoelectric micromachined ultrasound transducer arrays, operating at ~190 kHz, have been fabricated utilizing an aluminum nitride piezoelectric layer. Improved fabrication processes have reduced the frequency variation seen in our previous work with single transducers resulting in arrays of transducers with resonant frequencies (fn) that match within the fractional half-power bandwidth, 1/Q = 6.6%, of the transducer. Matching of ∆f/f < 2% has been achieved across a 20 element 2-D… Expand
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