AFM characterization of the shape of surface structures with localization factor.

@article{Bonyr2016AFMCO,
  title={AFM characterization of the shape of surface structures with localization factor.},
  author={Attila Bony{\'a}r},
  journal={Micron},
  year={2016},
  volume={87},
  pages={1-9}
}
Although with the use of scanning probe microscopy (SPM) methods the topographical imaging of surfaces is now widely available, the characterization of surface structures, especially their shape, and the processes which change these features is not trivial with the existing surface describing parameters. In this work the application of a parameter called localization factor is demonstrated for the quantitative characterization of surface structures and for processes which alter the shape of… CONTINUE READING

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