A zero-level packaged RF-MEMS switch with large contact force

  title={A zero-level packaged RF-MEMS switch with large contact force},
  author={Fabien Barriere and Arnaud Pothier and Aurelian Crunteanu and Matthieu Chatras and Pierre Blondy},
  journal={2011 6th European Microwave Integrated Circuit Conference},
This paper presents a novel compact RF-MEMS switch with large contact force. The switch can generate forces above 1.3mN, with 45V applied, while keeping a reasonable footprint. The actuator is based on a single metal 280μm diameter disc, that concentrates electrostatic force on a 8×8μm contact area. Zero level packaging is included in the fabrication, by intergating a metal electroplated shell fabricated above the mechanical part of the switch. The measured contact resistance of AuNi/Au… CONTINUE READING


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