A thermal actuator for nanoscale in situ microscopy testing: design and characterization

  title={A thermal actuator for nanoscale in situ microscopy testing: design and characterization},
  author={Yong Zhu and Alberto Corigliano and Horacio Dante Espinosa},
  journal={Journal of Micromechanics and Microengineering},
This paper addresses the design and optimization of thermal actuators employed in a novel MEMS-based material testing system. The testing system is designed to measure the mechanical properties of a variety of materials/structures from thin films to one-dimensional structures, e.g. carbon nanotubes (CNTs) and nanowires (NWs). It includes a thermal actuator and a capacitive load sensor with a specimen in-between. The thermal actuator consists of a number of V-shaped beams anchored at both ends… Expand
Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization
In situ mechanical characterization of nanostructures, such as carbon nanotubes and metallic nanowires, in scanning and transmission electron microscopes is essential for the understanding ofExpand
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The need to characterize nanometer-scale materials and structures has grown tremendously in the past decade. These structures may behave very differently from their larger counterparts and must beExpand
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The design, fabrication and characterization of a recently developed test platform for the characterization of nanoscale properties of thin films are presented. Platforms are comprised of aExpand
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MEMS-based tensile testing devices are powerful tools for mechanical characterization of nanoscale materials. In a typical configuration, their design includes an actuator to deliverExpand
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  • P. Meszmer, K. Hiller, +4 authors B. Wunderle
  • Materials Science
  • 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
  • 2014
In this paper, building blocks of a MEMS tensile testing platform are presented. The building blocks include a thermo-mechanical MEMS actuator, driven by an aluminum thin-film heater on a thermalExpand
In Situ Electron Microscopy Mechanical Testing of Silicon Nanowires Using Electrostatically Actuated Tensile Stages
Two types of electrostatically actuated tensile stages for in situ electron microscopy mechanical testing of 1-D nanostructures were designed, microfabricated, and tested. Testing was carried out forExpand
MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature
Microelectromechanical system (MEMS) devices based on electro-thermal actuation have been used over the past few years to perform tensile tests on nanomaterials. However, previous MEMS designs onlyExpand
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This paper presents a MEMS/NEMS device for fatigue and fracture characterization of nanomaterials. This device can apply static loads, cyclic loads, and their combinations in nanomechanicalExpand
A MEMS dynamic mechanical analyzer for in situ viscoelastic characterization of 3D printed nanostructures
Cellular, metamaterial structures with sub-micron features have shown the ability to become excellent energy absorbing materials for impact mitigation due to the enhanced mechanical properties ofExpand


An electromechanical material testing system for in situ electron microscopy and applications.
  • Yong Zhu, H. Espinosa
  • Materials Science, Medicine
  • Proceedings of the National Academy of Sciences of the United States of America
  • 2005
A previously undescribed real-time instrumented in situ transmission EM observation of carbon nanotubes failure under tensile load is presented here. Expand
A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures
We report on the performance of a microelectromechanical system (MEMS) designed for the in situ electron and x-ray microscopy tensile testing of nanostructures, e.g., carbon nanotubes and nanowires.Expand
A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy
An apparatus has been designed and implemented to measure the elastic tensile properties (Young's modulus and tensile strength) of surface micromachined polysilicon specimens. The tensile specimensExpand
Mechanical characterization of polysilicon through on-chip tensile tests
Two new types of on-chip tests have been designed in order to evaluate the elastic Young modulus and the fracture strength of polysilicon used in microelectromechanical systems (MEMS). The former isExpand
Analysis and design of polysilicon thermal flexure actuator
An analytical model that can accurately predict the performance of a polysilicon thermal flexure actuator has been developed. This model is based on an electrothermal analysis of the actuator,Expand
Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator
Thermomechanical microactuators possess a number of desirable attributes including ease of fabrication and large force and displacement capabilities relative to other types of microactuators. TheseExpand
A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing
This paper reports on a multi-purpose two-axis micropositioner with sub-nanometer position sensing for precise feedback control. Along each axis it has an electrothermal actuator, a capacitiveExpand
Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS]
A novel thermal actuator for the determination of polysilicon fracture strength and investigation of its fatigue is presented. The actuator consists of two narrow beams, which expand due toExpand
Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices
This paper describes electrothermal microactuators that generate rectilinear displacements and forces by leveraging deformations caused by localized thermal stresses. In one manifestation, anExpand
Self-buckling of micromachined beams under resistive heating
  • M. Chiao, L. Lin
  • Materials Science
  • Journal of Microelectromechanical Systems
  • 2000
Self-buckling behavior of micromachined beams under resistive heating is described by an electromechanical model with experimental verifications. This model consists of both electrothermal andExpand