A thermal actuator for nanoscale in situ microscopy testing: design and characterization

@article{Zhu2006ATA,
  title={A thermal actuator for nanoscale in situ microscopy testing: design and characterization},
  author={Yong Zhu and Alberto Corigliano and Horacio Dante Espinosa},
  journal={Journal of Micromechanics and Microengineering},
  year={2006},
  volume={16},
  pages={242-253}
}
This paper addresses the design and optimization of thermal actuators employed in a novel MEMS-based material testing system. The testing system is designed to measure the mechanical properties of a variety of materials/structures from thin films to one-dimensional structures, e.g. carbon nanotubes (CNTs) and nanowires (NWs). It includes a thermal actuator and a capacitive load sensor with a specimen in-between. The thermal actuator consists of a number of V-shaped beams anchored at both ends… Expand
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