A thermal actuator for nanoscale in situ microscopy testing: design and characterization

  title={A thermal actuator for nanoscale in situ microscopy testing: design and characterization},
  author={Yong Zhu and Alberto Corigliano and Horacio Dante Espinosa},
  journal={Journal of Micromechanics and Microengineering},
  pages={242 - 253}
This paper addresses the design and optimization of thermal actuators employed in a novel MEMS-based material testing system. The testing system is designed to measure the mechanical properties of a variety of materials/structures from thin films to one-dimensional structures, e.g. carbon nanotubes (CNTs) and nanowires (NWs). It includes a thermal actuator and a capacitive load sensor with a specimen in-between. The thermal actuator consists of a number of V-shaped beams anchored at both ends… 

Nano-scale testing of nanowires and carbon nanotubes using a microelectromechanical system

The need to characterize nanometer-scale materials and structures has grown tremendously in the past decade. These structures may behave very differently from their larger counterparts and must be

Design and characterization of a low temperature gradient and large displacement thermal actuators for in situ mechanical testing of nanoscale materials

The design, fabrication and characterization of a recently developed test platform for the characterization of nanoscale properties of thin films are presented. Platforms are comprised of a

Multiphysics design and implementation of a microsystem for displacement-controlled tensile testing of nanomaterials

MEMS-based tensile testing devices are powerful tools for mechanical characterization of nanoscale materials. In a typical configuration, their design includes an actuator to deliver

In Situ Electron Microscopy Mechanical Testing of Silicon Nanowires Using Electrostatically Actuated Tensile Stages

Two types of electrostatically actuated tensile stages for in situ electron microscopy mechanical testing of 1-D nanostructures were designed, microfabricated, and tested. Testing was carried out for

MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature

Microelectromechanical system (MEMS) devices based on electro-thermal actuation have been used over the past few years to perform tensile tests on nanomaterials. However, previous MEMS designs only

A MEMS dynamic mechanical analyzer for in situ viscoelastic characterization of 3D printed nanostructures

Cellular metamaterial structures with sub-micron features have shown the ability to become excellent energy absorbing materials for impact mitigation due to the enhanced mechanical properties of

Designing and Analyzing Sensor and Actuator of a Nano/Micro-System for Fatigue and Fracture Characterization of Nanomaterials

This paper presents a MEMS/NEMS device for fatigue and fracture characterization of nanomaterials. This device can apply static loads, cyclic loads, and their combinations in nanomechanical

Studying the Dynamical Response of Nano-Microelectromechanical Devices for Nanomechanical Testing of Nanostructures

— Characterizing the fatigue and fracture properties of nanostructures is one of the most challenging tasks in nanoscience and nanotechnology due to lack of a MEMS/NEMS device for generating uniform

Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments

  • G. SchondelmaierS. Hartmann B. Wunderle
  • Engineering
    2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
  • 2013
For properties characterization of nanostructured materials and simultaneously to predict their reliability a tensile testing system consisting of a thermal actuator and a lateral nano-Newton force



An electromechanical material testing system for in situ electron microscopy and applications.

  • Yong ZhuH. Espinosa
  • Materials Science, Engineering
    Proceedings of the National Academy of Sciences of the United States of America
  • 2005
A previously undescribed real-time instrumented in situ transmission EM observation of carbon nanotubes failure under tensile load is presented here.

A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures

We report on the performance of a microelectromechanical system (MEMS) designed for the in situ electron and x-ray microscopy tensile testing of nanostructures, e.g., carbon nanotubes and nanowires.

A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy

An apparatus has been designed and implemented to measure the elastic tensile properties (Young's modulus and tensile strength) of surface micromachined polysilicon specimens. The tensile specimens

Mechanical characterization of polysilicon through on-chip tensile tests

Two new types of on-chip tests have been designed in order to evaluate the elastic Young modulus and the fracture strength of polysilicon used in microelectromechanical systems (MEMS). The former is

Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS]

A novel thermal actuator for the determination of polysilicon fracture strength and investigation of its fatigue is presented. The actuator consists of two narrow beams, which expand due to

Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices

This paper describes electrothermal microactuators that generate rectilinear displacements and forces by leveraging deformations caused by localized thermal stresses. In one manifestation, an

Self-buckling of micromachined beams under resistive heating

  • M. ChiaoL. Lin
  • Engineering
    Journal of Microelectromechanical Systems
  • 2000
Self-buckling behavior of micromachined beams under resistive heating is described by an electromechanical model with experimental verifications. This model consists of both electrothermal and