A surface-tension driven micropump for low-voltage and low-power operations

@inproceedings{Yun2002ASD,
  title={A surface-tension driven micropump for low-voltage and low-power operations},
  author={Kwang-Seok Yun and Il-Joo Cho and Jong Uk Bu and Chang-Jin Kim and Euisik Yoon},
  year={2002}
}
  • Kwang-Seok Yun, Il-Joo Cho, +2 authors Euisik Yoon
  • Published 2002
  • Materials Science
  • In this paper, we first report a micropump actuated by surface tension based on continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in a microchannel filled with an electrolyte as actuation energy for the micropump. This allows low voltage operation as well as low-power consumption. The micropump is composed of a stack of three wafers bonded together. The microchannel is formed on a glass wafer using SU-8 and is filled with electrolyte where the… CONTINUE READING

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