A surface micromachined microtactile sensor array

Abstract

This paper discusses the design and testing of an eight-by-eight tactile capacitive array sensor for detection of sub-millimeter features and objects, where the entire sensor array is smaller than normal human spatial resolution of 1mm. Each square tactel is less than 100μm on a side, with similar spacing between elements. The structural material was doped… (More)
DOI: 10.1109/ROBOT.1996.503564

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