A substrate impregnated support edge for the improved properties of a coating ring

@inproceedings{M2012ASI,
  title={A substrate impregnated support edge for the improved properties of a coating ring},
  author={约瑟夫·M·拉内什 and 阿伦·缪尔·亨特},
  year={2012}
}
Embodiments of the invention provides a substrate support for supporting a substrate edge ring. One embodiment, there is provided a substrate support ring. The substrate support ring comprises an annular body. The annular body comprising: an outer strip, the strip of the outer side wall extending radially inwardly from the outer ring; and a support region of the substrate, the substrate supporting area extends from the inner portion of the outer strip inwardly, wherein the annular the body… CONTINUE READING

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