A substrate energy dissipation mechanism in in-phase and anti-phase micromachined z-axis vibratory gyroscopes

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@inproceedings{Trusov2008ASE, title={A substrate energy dissipation mechanism in in-phase and anti-phase micromachined z-axis vibratory gyroscopes}, author={Alexander A. Trusov and Adam R. Schofield and Andrei M. Shkel}, year={2008} }