A subnanometre heterodyne interferometric system with improved phase sensitivity using a three-longitudinal-mode He-Ne laser

@inproceedings{Yokoyama2001ASH,
  title={A subnanometre heterodyne interferometric system with improved phase sensitivity using a three-longitudinal-mode He-Ne laser},
  author={Toshiyuki T. Yokoyama and Tsutomu Araki and Shuko Yokoyama and Norihito Suzuki},
  year={2001}
}
We present a high-resolution heterodyne interferometric system using a high-output-power, three-longitudinal-mode He-Ne laser. In this system, an interferometric wavelength of λ/2 is synthesized with the super-heterodyne detection of the three modes, resulting in twice the sensitivity for the target displacement in comparison with the conventional two-frequency interferometer. In the experiment, the achievement of subnanometre resolution has been confirmed. 

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