A statistical method for fast and accurate capacitance extraction in the presence of floating dummy fills

  title={A statistical method for fast and accurate capacitance extraction in the presence of floating dummy fills},
  author={Shabbir H. Batterywala and Rohit Ananthakrishna and Yansheng Luo and Alex Gyure},
  journal={19th International Conference on VLSI Design held jointly with 5th International Conference on Embedded Systems Design (VLSID'06)},
  pages={6 pp.-}
Dummy fills are being extensively used to enhance CMP planarity. However presence of these fills can have a significant impact on the values of interconnect capacitances. Accurate capacitance extraction accounting for these dummies is CPU intensive and cumbersome. For one, there are typically hundreds to thousands of dummy fills in a small layout region, which stress the general purpose capacitance extractor. Second, since these dummy fills are not introduced by the designers, it is of no… CONTINUE READING
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