A static approach for the frequency shift of parasitic excitations in MEMS gyroscopes with geometric nonlinear drive mode

@article{Putnik2017ASA,
  title={A static approach for the frequency shift of parasitic excitations in MEMS gyroscopes with geometric nonlinear drive mode},
  author={Martin Putnik and Stefano Cardanobile and Steven Kehrberg and Cristian Nagel and Peter Degenfeld-Schonburg and Matthias Kuehnel and Jan E. Mehner},
  journal={2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)},
  year={2017},
  pages={144-147}
}
We present a method to estimate the frequency shift of parasitic modes in MEMS gyroscopes with respect to the displacement of the drive mode. Our method is based on static FE simulations in ANSYS and thus it is computationally efficient and very fast. The method correctly reproduces the measurements of a benchmark MEMS structure. 

References

Publications referenced by this paper.
SHOWING 1-10 OF 15 REFERENCES

J

  • S. Dou, B. S. Strachan, S. W. Shaw
  • S. Jensen, ”Structural optimization for nonlinear…
  • 2015
2 Excerpts

Simulation und Charakterisierung der Nichtidealitaeten mikromechanischer Drehratesensoren,

  • S. Kehrberg
  • Der Andere Verlag, PhD thesis, Chemnitz…
  • 2015
1 Excerpt

Ansys mechanical apdl documentation

  • S. IP
  • Ansys Help View, vol. 15.0
  • 2013
2 Excerpts

A

  • C. Acar
  • Shkel, ”MEMS Vibratory Gyroscopes: Structural…
  • 2008

Similar Papers

Loading similar papers…