A solution to the charging problems in capacitive micromachined ultrasonic transducers.

  title={A solution to the charging problems in capacitive micromachined ultrasonic transducers.},
  author={Yongli Huang and Edward O. Haeggstr{\"o}m and Xuefeng Zhuang and A. Sanlı Ergun and Butrus T. Khuri-Yakub},
  journal={IEEE transactions on ultrasonics, ferroelectrics, and frequency control},
  volume={52 4},
We report on a capacitive micromachined ultrasonic transducer (CMUT) featuring isolation posts (PostCMUT) as a solution to the charging problems caused by device fabrication and operation. This design improves the device reliability. The PostCMUTs were fabricated using a newly developed process based on the wafer-bonding technique. Paired tests showed the superior reliability characteristics of the PostCMUT design compared to those of conventional CMUT designs. No deleterious effect of the new… CONTINUE READING
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