A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals

@inproceedings{Li2006ASM,
  title={A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals},
  author={Peng Li and Xinxin Li},
  year={2006}
}
This paper presents a novel SiO2 microcantilever sensor for high-sensitive gaseous chemical detection. A thin single-crystalline silicon piezoresistor is integrated in the SiO2 cantilever for low-noise and high-resoluble signal readout. The paper relates the MEMS formation, modeling and detecting experiments of the sensor. The micro-fabrication of the cantilever sensor is processed at a single side (front side) of the silicon wafer, combined with functionalization of a self-assembled monolayer… CONTINUE READING

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