A simple-versatile approach to achieve all-Si-based optical micro-cavities

@inproceedings{Gallo2013ASA,
  title={A simple-versatile approach to achieve all-Si-based optical micro-cavities},
  author={Ivan Braga Gallo and A R Zanatta},
  year={2013}
}
At present, solid thin films are recognized by their well established and mature processing technology that is able to produce components which, depending on their main characteristics, can perform either passive or active functions. Additionally, Si-based materials in the form of thin films perfectly match the concept of miniaturized and low-consumption devices—as required in various modern technological applications. Part of these aspects was considered in the present work that was concerned… CONTINUE READING