A simple capacitance calculation formula for MEMS capacitive type sensors with square membranes

@article{Rahman2009ASC,
  title={A simple capacitance calculation formula for MEMS capacitive type sensors with square membranes},
  author={Mosaddequr Rahman and Syed Abbas and Sazzadur Chowdhury},
  journal={2009 Joint IEEE North-East Workshop on Circuits and Systems and TAISA Conference},
  year={2009},
  pages={1-4}
}
A simple highly accurate mathematical method has been developed to calculate capacitance change for MEMS capacitive type sensors with square membranes. The method improves the accuracy of existing methods as it takes account of the membrane deflection due to the electrostatic pressure in addition to the external mechanical pressure, considers the fringing field effects, and is also applicable to large deflection cases. The model has been verified by 3-D electromechanical finite element analysis… CONTINUE READING

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