A simple analysis of an inductive RF discharge

@inproceedings{Piejak1992ASA,
  title={A simple analysis of an inductive RF discharge},
  author={Robert B. Piejak and Valery Godyak and Benjamin Alexandrovich},
  year={1992}
}
The electrical properties of an inductive low pressure RF discharge have been analysed by considering the discharge to be a one-turn secondary of an air-core transformer. Expressions for spatially averaged quantities representing familiar discharge parameters such as the voltage, current and electric field have been determined as functions of measured electrical parameters of the primary circuit. Based on an analytical expression relating the coupling between the electrical characteristics of… CONTINUE READING

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