A silicon self-aligned non-reverse valve

@article{Smith1991ASS,
  title={A silicon self-aligned non-reverse valve},
  author={L. Smith and B. Hok},
  journal={TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers},
  year={1991},
  pages={1049-1051}
}
A novel design of a microvalve has been fabricated. The valve is fabricated on one 

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