A semiconductor under insulator technology in indium phosphide
@article{Mnaymneh2012ASU, title={A semiconductor under insulator technology in indium phosphide}, author={Khaled Mnaymneh and Dan Dalacu and Simon Fr'ed'erick and Jean Lapointe and Philip J. Poole and Robin L. Williams}, journal={Applied Physics Letters}, year={2012}, volume={101}, pages={151120} }
This letter introduces a semiconductor-under-insulator (SUI) technology in InP for designing strip waveguides that interface InP photonic crystal membrane structures. Strip waveguides in InP-SUI are supported under an atomic layer deposited insulator layer in contrast to strip waveguides in silicon supported on insulator. We show a substantial improvement in optical transmission when using InP-SUI strip waveguides interfaced with localized photonic crystal membrane structures when compared with…
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III-V access waveguides using atomic layer deposition
- PhysicsPhotonics West - Micro and Nano Fabricated Electromechanical and Optical Components
- 2013
Normally, the larger refractive index contrast of silicon-on-insulator (SOI) photonics used for transporting highly confined optical modes is not available in compound semiconductor systems because…
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