A self-aligned 1-µm CMOS technology for VLSI

@article{Hu1983AS1,
  title={A self-aligned 1-\&\#181;m CMOS technology for VLSI},
  author={G. J. Hu and Y. Taur and R. Dennard and L. Terman and C. Y. Ting},
  journal={1983 International Electron Devices Meeting},
  year={1983},
  pages={739-741}
}
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