A robust high power-handling (> 10 W) RF MEMS switched capacitor

  title={A robust high power-handling (> 10 W) RF MEMS switched capacitor},
  author={Isak C Reines and G. M. Rebeiz},
  journal={2011 IEEE 24th International Conference on Micro Electro Mechanical Systems},
We present the design, fabrication, and measurement of an RF MEMS switched capacitor with > 10 W power handling at 10 GHz under hot-switching conditions while maintaining a relatively-low (< 30 V) pull-in voltage. The device consists of separate RF and DC electrodes, which are defined underneath a temperature-stable circular beam, to result in a large spring constant above the RF electrode. The design increases both the restoring force above the RF electrode and the RF self-actuation… CONTINUE READING
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  • and Technology. John Wiley
  • 2003
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