• DOI:10.1016/J.SNA.2012.10.016
Corpus ID: 108464480

A review of nanometer resolution position sensors: Operation and performance

@article{Fleming2013ARO,
  title={A review of nanometer resolution position sensors: Operation and performance},
  author={A. Fleming},
  journal={Sensors and Actuators A-physical},
  year={2013},
  volume={190},
  pages={106-126}
}

• A. Fleming
• Published 2013
• Engineering
• Sensors and Actuators A-physical

Abstract Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position… Expand

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