A review of nanometer resolution position sensors: Operation and performance

@article{Fleming2013ARO,
  title={A review of nanometer resolution position sensors: Operation and performance},
  author={A. Fleming},
  journal={Sensors and Actuators A-physical},
  year={2013},
  volume={190},
  pages={106-126}
}
  • A. Fleming
  • Published 2013
  • Engineering
  • Sensors and Actuators A-physical
Abstract Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position… Expand
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References

SHOWING 1-10 OF 82 REFERENCES
Nanoposition sensors with superior linear response to position and unlimited travel ranges.
  • 11
Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning
  • 56
Low-Cost IR Reflective Sensors for Submicrolevel Position Measurement and Control
  • 41
Review: Semiconductor Piezoresistance for Microsystems
  • 585
...
1
2
3
4
5
...