A review of micromachined thermal accelerometers

@article{Mukherjee2017ARO,
  title={A review of micromachined thermal accelerometers},
  author={R. Mukherjee and Joydeep Basu and P. Mandal and P. K. Guha},
  journal={Journal of Micromechanics and Microengineering},
  year={2017},
  volume={27},
  pages={123002}
}
Thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and integrability with CMOS integrated circuit technology. This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling, and… Expand
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