A reliable and compact polymer-based package for capacitive RF-MEMS switches

@article{Oya2004ARA,
  title={A reliable and compact polymer-based package for capacitive RF-MEMS switches},
  author={Yu Oya and A. Okubora and M. Van Spengen and Ph. Soussan and Serguei Stoukatch and Xavier Rottenberg and Petar Ratchev and H. A. C. Tilmans and Walter de Raedt and Eric Beyne and Piet de Moor and Inge de Wolf and K. Baert},
  journal={IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004.},
  year={2004},
  pages={31-34}
}
We present a package for capacitive RF-MEMS switches that is based on laminate substrates and BCB-sealed glass caps. The assembly is realised using standard packaging equipment. The package is only 1.1 mm thick, gross leak tight, has high mechanical strength, and passes accelerated lifetime testing. RF insertion loss was lower than 0.6 dB below 15 GHz. Capacitive switches packaged by the proposed method reach a lifetime of 10/sup 7/ cycles, and sustain 1000 h exposure at 85/spl deg/C/85%RH.