A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures


In this paper, two approaches to self-consistent electromechanical analysis of three-dimensional micro-electro-mechanical structures are described. Both approaches combine finite-element mechanical analysis with multipole-accelerated electrostatic analysis, the first using a relaxation algorithm and the second using a surface/Newton generalized conjugate… (More)
DOI: 10.1145/259794.259842

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