A quick method to realize and characterize bimorph cantilevers

Abstract

Bimorph cantilever-based thermal actuators are promising for numerous applications like micro-mirror arrays, etc. This paper presents a simple technique for fabricating bimorph cantilevers using a single photolithography process and a quick optical methodology for the characterization of such structures. A bimorph combination of Al-SiO<sub>2</sub> has been… (More)

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