A proposal of gyroscope sensor using asymmetrical comb drive actuator

Abstract

We have analyzed an asymmetric comb-drive actuator as an angular rate sensor. In common comb-drive actuator, the movable and the fixed comb-electrodes are arranged one after the other with equally interval. In our model, on the other hand, the interval is not equally; one side-to-side comb-electrode gap is smaller than another one. We calculate electrical… (More)

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Cite this paper

@article{Oiso2007APO, title={A proposal of gyroscope sensor using asymmetrical comb drive actuator}, author={Hajime Oiso and Susumu Kariya and Gen Hashiguchi}, journal={SICE Annual Conference 2007}, year={2007}, pages={2935-2939} }