A process for producing a trench with a buried plate

@inproceedings{Hennecke1999APF,
  title={A process for producing a trench with a buried plate},
  author={Sabine Hennecke and Martin Schrems},
  year={1999}
}
A method of forming a trench having a buried plate comprising the steps of: - forming a trench (1) with a grave side wall in a substrate (2), said trench (1) having an upper portion and a lower portion; - forming an undoped silicon oxide layer (4) on the grave side wall in the upper and lower region of the trench (1); - forming a doped silicate glass filling (3) in the upper and lower region of the trench (1); - Removal of the doped silicate glass panel (3) and the non-doped silicon oxide layer… CONTINUE READING

Similar Papers