A pre-corrected FFT algorithm for fast electromagnetic modeling of three-dimensional integrated passives in multilayered substrates

Abstract

A novel fast algorithm for accurate broadband electromagnetic analysis of 3-D passives embedded in multilayered media is presented. The electromagnetic boundary-value-problem for the interconnect layout embedded in silicon substrates is formulated in terms of Michalski-Zhang's formulation C for the Mixed-Potential-Integral-Equation (MPIE). The MPIE is… (More)

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Cite this paper

@article{Okhmatovski2009APF, title={A pre-corrected FFT algorithm for fast electromagnetic modeling of three-dimensional integrated passives in multilayered substrates}, author={V. I. Okhmatovski and Maokai Yuan and Ian Jeffrey and Rodney Phelps}, journal={2009 IEEE MTT-S International Microwave Symposium Digest}, year={2009}, pages={1581-1584} }