A phase-noise model for nonlinear piezoelectrically-actuated MEMS oscillators


This paper presents a new empirical exponential-series-based model that describes the measured phase-noise (PN) of a nonlinear piezoelectric MEMS oscillator. Since the order of terms in the Leeson's model can only provide at maximum −30 dB/dec slope, a model with higher order terms is proposed to determine an effective resonator quality factor (Qeff) and… (More)
DOI: 10.1109/ISCAS.2011.5937541

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