A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection.

@article{Chen2012ANT,
  title={A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection.},
  author={Chung-De Chen and Yu-Jen Wang and Pin Chang},
  journal={Optics express},
  year={2012},
  volume={20 24},
  pages={27003-17}
}
This study presents a novel design for a two-axis scanning device driven by lead-zirconate-titanate (PZT) ceramic. The proposed device consists of a scanning mirror and a Y-shaped piezoelectric actuator. The scanning mirror was fabricated using an MEMS process involving three masks. Experimental results show that the fast and slow frequencies at resonance are 25.0 kHz and 0.56 kHz, respectively. The optical scanning angles are 27.6° and 39.9°. The power consumption of the device is 13.4 mW at a… CONTINUE READING