A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

Abstract

A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl ammonium hydroxide (TMAH) of 25 wt.% solution is used as an… (More)

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@inproceedings{Saravanan2006ANS, title={A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators}, author={Sivarajan Saravanan and G. J. M. Krijnen and M. C. Elwenspoek}, year={2006} }