A novel solid state pulsed power module for excimer laser

@article{Strowitzki2010ANS,
  title={A novel solid state pulsed power module for excimer laser},
  author={Claus Fritz Strowitzki and Peter Zacharias and Peter Seckl},
  journal={2010 IEEE International Power Modulator and High Voltage Conference},
  year={2010},
  pages={369-372}
}
For effective excimer laser pumping high voltage pulses with the pulse duration of 100ns and energies from a fraction of joules to some 10 joules are necessary. This energy is deposited via a gas discharge into the laser vessel. The generation of these pulses traditionally provided by Thyraton circuits. The limited lifetime and repetition rates of such a device does not fulfill the requirements of a modern excimer laser. State of the art is solid state circuits with IGBT switches, high voltage… CONTINUE READING