A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth

@article{Lu2015ANS,
  title={A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth},
  author={Qianbo Lu and Jian Bai and Wenxiu Lian and Shuqi Lou},
  journal={10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year={2015},
  pages={248-253}
}
In this paper, an innovative scheme design of an optical NEMS accelerometer based on a grating with proper sensitivity and dynamic range is proposed, which can be fabricated by a single SOI chip and IC integration technique. An optical micro cavity composed of a grating and the bottom bulk silicon coated with argentum serves as a high sensitivity displacement sensor. The optical displacement detecting principle is specifically discussed in this paper. The parameter of grating, which acts as… CONTINUE READING