A novel non-contact s-parameter measurement method for sub-MMW multi-port on-wafer devices

@article{Moallem2014ANN,
  title={A novel non-contact s-parameter measurement method for sub-MMW multi-port on-wafer devices},
  author={Meysam Moallem and Kamal Sarabandi},
  journal={2014 USNC-URSI Radio Science Meeting (Joint with AP-S Symposium)},
  year={2014},
  pages={2-2}
}
The increasing interest in the development of micromachined components for sub-MMW and terahertz applications calls for a reliable and accurate measurement method for characterization of such components. The conventional on-wafer measurement technique using GSG probes, which require physical contact, are subject to wear and damage of the probe tips due to… CONTINUE READING