A novel method of photonic bandgap lithography of porous silicon heterostructures

  • Heungman Parka, Alex A. Stramelb, David A. Harjub, Sharon M. Weissa, James H. Dickersona
  • Published 2008

Abstract

A method to modulate the local optical properties of porous silicon photonic crystals is reported. The porous silicon photonic crystals are fabricated by electrochemical etching in a hydrofluoric acid-based electrolyte. Local oxidation was performed using either a UV lamp or 532 nm laser to irradiate selective regions of the photonic crystal. The sample was… (More)

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