A novel low pressure sensor with fin-structures

Abstract

A fin type silicon-based Pirani vacuum gauge and its measurement methodology are first introduced. It provides a wide pressure measurement range from 0.1 torr to 760 torr with device size less than 300 × 300μm2. This vacuum gauge can be monolithically integrated with motion sensors or resonators using the same fabrication processes, and thus further be… (More)

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