A novel low cost failure analysis technique for dielectric charging phenomenon in electrostatically actuated MEMS devices

@article{Zaghloul2010ANL,
  title={A novel low cost failure analysis technique for dielectric charging phenomenon in electrostatically actuated MEMS devices},
  author={Usama Zaghloul and Fabio Coccetti and G. J. Papaioannou and Patrick Pons and Robert Plana},
  journal={2010 IEEE International Reliability Physics Symposium},
  year={2010},
  pages={237-245}
}
This work presents a novel failure analysis technique for the dielectric charging phenomenon in electrostatically driven MEMS devices. The new reliability assessment methodology makes use of Kelvin Probe Force Microscopy (KPFM) and it targets in this specific work thin PECVD silicon nitride films for electrostatic capacitive RF MEMS switches. The proposed technique took advantage of the AFM tip to simulate charge injection through asperities then measure the induced surface potential. The… CONTINUE READING
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