A novel SCR-based protection structure against ESD with efficient multi-finger triggering

Abstract

In this paper, a new SCR-based protection structure is presented relying on the bimodal operation of a LSCR. STMSCR is multi-finger compliant thus allowing areaefficient design of pad-located ESD protection. Without any process customisation, an HBM failure threshold over 115V/μm is reached for the first time while always ensuring current uniformity in multi-finger structures.

Cite this paper

@inproceedings{Azas2003ANS, title={A novel SCR-based protection structure against ESD with efficient multi-finger triggering}, author={Florence Aza{\"{i}s and B. Caillard}, year={2003} }