A novel SAM technique for the direct measurement of backscattering factors and the elucidation of background shapes in AES

  title={A novel SAM technique for the direct measurement of backscattering factors and the elucidation of background shapes in AES},
  author={Mohamed El Gomati},
  journal={Surface Science},
  • M. Gomati
  • Published 1 April 1985
  • Physics
  • Surface Science
9 Citations

Prediction of auger backscattering factors from measurements of spectral backgrounds

The shape of N(E) has been obtained from a carefully characterized electron spectrometer for 24 different elements and compounds. The secondary electron cascade has been found to obey a form N(E) =

Thickness dependence of the characteristic X‐ray yield and the Auger backscattering factor

A Monte Carlo model employing a screened Rutherford scattering cross-section and the Bethe energy loss approximation has been used to investigate the thickness dependence of the backscattering

A new approach in non-destructive characterization and X-Y profilometry of coatings

A scanning electron microscope equipped with an x-ray detector has been used to characterize the thickness and elemental composition of coating on substrates. The proportionality between the x-ray

Quantifying data from Auger spectra and images

A method for quantifying Auger spectra and including matrix effects is described. This method corrects iteratively for the effects of electron back-scattering, the inelastic mean free path and atomic

Automatic removal of substrate backscattering effects in Auger imaging and spectroscopy

The York multi-spectral scanning Auger microscope has been used to investigate the correlations between Auger and backscattered electron images collected simultaneously from a electron spectrometer

Surface analysis: X-ray photoelectron spectroscopy and Auger electron spectroscopy.

The goal of this review is to help analysts solve the problems that are encountered in using X-ray photoelectron spectroscopy and AES in a regular laboratory with commercially available equipment.



The estimation of backscattering effects in electron-induced Auger spectra

When an electron beam is used to initiate Auger electron spectra, the secondary electrons backscattered from the solid can also cause ionization and Auger emission. This leads to an enhancement of

Estimates of the Efficiencies of Production and Detection of Electron-Excited Auger Emission

The efficiency of production of electrons emitted by the Auger process from the surface of a solid irradiated with a beam of electrons in the energy region below 2 keV is estimated. It is shown that

Backscattering effects in Auger electron spectroscopy: A review

Quantitative Auger electron spectroscopy requires knowledge of a factor correcting for backscattering effects. This paper discusses the definition of the backscattering correction and reviews the

High-Resolution X-Ray Photoemission Spectrum of the Valence Bands of Gold

High-resolution gold-valence-band photoemission spectra were obtained by the use of monochromatized $\mathrm{Al} K\ensuremath{\alpha}$ radiation and a single-crystal specimen. After background and