A novel MEMS pressure sensor with MOSFET on chip

@article{Zhang2008ANM,
  title={A novel MEMS pressure sensor with MOSFET on chip},
  author={Zhao-hua Zhang and Yan-Hong Zhang and Li-Tian Liu and Tian-ling Ren},
  journal={2008 IEEE Sensors},
  year={2008},
  pages={1564-1567}
}
A novel MOSFET pressure sensor was proposed based on the MOSFET stress sensitive phenomenon, in which the source-drain current changes with the stress in channel region. Two MOSFETpsilas and two piezoresistors were employed to form a Wheatstone bridge served as sensitive unit in the novel sensor. Compared with the traditional piezoresistive pressure sensor, this MOSFET sensorpsilas sensitivity is improved significantly, meanwhile the power consumption can be decreased. The fabrication of the… CONTINUE READING

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