A novel CVD/CVI reactor with an in-situ sampling apparatus connected to an online GC/MS

Abstract

Spatially resolved analysis of the composition of the gas-phase during chemical vapor deposition depends on an effective sampling apparatus. In the present work, a novel in-situ sampling and cooling apparatus was presented, which is connected directly to an online GC/MS. Simulations of the temperature distribution in the cooling apparatus show that sample… (More)

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