A novel 700V deep trench isolated double RESURF LDMOS with P-sink layer

Abstract

A novel DTI double RESURF LDMOS with P-sink layer is presented and experimentally demonstrated in this paper. The novel structure features a P-sink layer around the bottom of deep trench, which is formed with the Deep N-type Well (DNW) after the process of high temperature driving in. The highly doped P-sink layer restrains the extension of depletion region… (More)

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