A novel 0–3 kPa piezoresistive pressure sensor based on a shuriken-structured diaphragm


This paper reported a novel high sensitivity and linearity 0-3 kPa piezoresistive pressure sensor by carefully trading off the stress on the beam edge and the deflection of the sensing diaphragm. A shuriken-structured diaphragm (SSD) was proposed for the first time to improve both sensitivity and linearity for the piezoresistive pressure sensor. The… (More)


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