A nonlinear electrostatic actuator with near zero impact velocity, low driving voltage and large stable travel

This paper presents a nonlinear electrostatic actuator which utilizes the nonlinear mechanical properties of the classical clamped-guided beam springs with large deform­ation to slow impact velocity of the movable plates. The initial stiffness of the spring is very small but increases significantly with the displacement. In this way, the increased kinetic… CONTINUE READING