A new test facility for efficient evaluation of MEMS contact materials

@inproceedings{Yang2007ANT,
  title={A new test facility for efficient evaluation of MEMS contact materials},
  author={Zhenyin Yang and D. J. Lichtenwalner and A L Morris and Siegfried Menzel and Christian Nauenheim and Alexei Gruverman and Jacqueline Krim and A. I. Kingon},
  year={2007}
}
A novel test facility for the efficient evaluation of microelectromechanical system (MEMS) switches and the development of alternative contact materials is described. The facility utilizes the upper cantilever from commercial MEMS contact switches, and tests these against alternative bottom contact materials within a modified atomic force microscope (AFM). The test closely approximates the real switch, but can accommodate a wider range of test conditions and contact materials. The facility… CONTINUE READING