A new control strategy for high-speed atomic force microscopy

@inproceedings{Schitter2003ANC,
  title={A new control strategy for high-speed atomic force microscopy},
  author={Georg Schitter and Frank Allg{\"o}wer and Andreas Stemmer},
  year={2003}
}
An advanced controller consisting of a feedback and feedforward part is presented to improve the performance of an atomic force microscope (AFM) enabling topography measurements at higher scan rates with a reduced measurement error. The tip–sample interaction force is held constant by an H∞-controller while the scanner is simultaneously tracked to the topography of the last recorded scan line by a model-based feedforward controller. The designed controller is implemented on a commercial AFM… CONTINUE READING
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